Progression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology
Progression of the Multipole Resonance Probe: Advanced Plasma Sensors Based on LTCC-Technology
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多极共振探头的进展：基于 LTCC 技术的先进等离子体传感器
DOI：
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发表时间：
2018
期刊：
影响因子：
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通讯作者：
I. Rolfes
中科院分区：
文献类型：
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作者：
Dennis Pohle;C. Schulz;M. Oberberg;A. Serwa;P. Uhlig;P. Awakowicz;I. Rolfes
多极共振探头(MRP)是一种强大而经济的诊断工具，可用于确定与工艺相关的等离子体参数。由于其原位测量的概念，甚至可以提供所研究的等离子体的空间分辨信息。为了将传感器对过程的影响降到最低，引入了安装在反应堆壁上的平面多极共振探头(PMRP)作为一种微创监测工具。为了在实际过程的广泛领域中有效地应用这些传感器，需要行业兼容的实施方案。本文提出了基于LTCC技术的MRP和PMRP的高级实现，适用于高温等离子体过程的监控：$mathbf{mrp}_{mathbf{ltcc}}$和堆叠的$mathbf{pmrp}_{mathbf{ltcc}}$。后者代表了一种新颖的紧凑型PMRP设计，它使用具有垂直堆叠元件的LTCC多层结构。这两种传感器都在三维电磁模拟中进行了研究，并与在双电感耦合等离子体(DICP)中进行的测量进行了比较。
The multipole resonance probe (MRP) is a powerful and economical diagnostic tool for the determination of process-relevant plasma parameters. Due to its in-situ measurement concept even spatially resolved information of the plasma under investigation is provided. In order to minimize the influence of the sensor on the process, the planar multipole resonance probe (pMRP) was introduced as a minimally invasive monitoring tool, mounted into the reactor wall. For an effective application of these sensors in a wide field of real processes, industry compatible implementations are required. In this paper, advanced realizations of the MRP and pMRP based on LTCC-technology are presented, which are applicable for the supervision and control of plasma processes at high temperatures: the $mathbf{MRP}_{mathbf{LTCC}}$ and the stacked $mathbf{pMRP}_{mathbf{LTCC}}$. The latter represents a novel compact design of the pMRP using an LTCC multilayer structure with vertically stacked components. Both sensors are investigated within 3D electromagnetic simulations and compared to measurements performed in a double inductively coupled plasma (DICP).