Tapping Mode Atomic Force Microscopy Analysis of the Growth Process of Electroless Nickel‐Phosphorus Films on Nonconducting Surfaces
Tapping Mode Atomic Force Microscopy Analysis of the Growth Process of Electroless Nickel‐Phosphorus Films on Nonconducting Surfaces
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非导电表面化学镀镍磷薄膜生长过程的轻敲模式原子力显微镜分析
DOI：
10.1149/1.1838153
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发表时间：
1997
期刊：
影响因子：
--
通讯作者：
T. Osaka
中科院分区：
文献类型：
--
作者：
T. Homma;Masayuki Tanabe;Kunimasa Itakura;T. Osaka
采用轻敲原子力显微镜（TMAFM）对非导电衬底上化学镀NiP薄膜的生长过程进行了定量研究，重点研究了衬底表面的成核密度。三种催化工艺用于聚酰亚胺基板，以获得900，750，和550个核/μ m2的成核密度。的TMAFM观察表明，薄膜的生长主要是通过连续的成核的细颗粒与几个纳米的直径和他们的三维生长，成核密度的影响状态的颗粒的聚集，因此得到的表面形貌。较低的形核密度使表面粗糙，晶粒较大，直径约为100 μ m。80纳米。成核密度的影响随薄膜生长而衰减，在薄膜厚度约为0.05 μ m时，成核密度的影响消失。2000 nm由于连续成核。作为比较，还研究了在用于硬磁盘的NiP涂层Al基底上NiP的生长过程，该基底具有3000个核/μ m2的较高成核密度。该过程导致光滑的表面而不形成聚集体。在此基础上，进行了均方根粗糙度和尺度分析，以定量评估生长过程的差异
The growth process of electroless nickel-phosphorous (NiP) films on nonconducting substrate was investigated quantitatively using tapping mode atomic force microscopy (TMAFM) with focus upon the nucleation density on the substrate surface. Three kinds of catalyzing processes were used for polyimide substrates to obtain nucleation densities of 900, 750, and 550 nuclei/μm 2 . The TMAFM observation showed that the film growth proceeds mainly through successive nucleation of fine particles with several nanometers in diameter and their three-dimensional growth, and that the nucleation density influences the state of aggregation of the particles and hence the resulting surface topography. The lower nucleation density developed the rougher surface with larger grains with a diameter of ca. 80 nm. However, the effect of nucleation density decayed with film growth and eventually vanished at a thickness of ca. 2000 nm due to successive nucleation. For comparison, the growth process of NiP on NiP coated Al substrate, which is used for rigid magnetic disk applications and has a higher nucleation density of 3000 nuclei/μm 2 , was also examined. This process resulted in a smooth surface without the formation of aggregates. Based upon these results, the root-mean-square roughness and scaling analyses were performed to evaluate quantitatively the differences in growth process