Organic solvent-free water-developable sugar resist material derived from biomass in green lithography

Organic solvent-free water-developable sugar resist material derived from biomass in green lithography
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绿色光刻中源自生物质的无有机溶剂水可显影抗糖材料

DOI:
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发表时间:
2014
期刊:
Microelectron. Eng.
影响因子:
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通讯作者:
Syoji Ito and Hiroshi Miyasaka
Syoji Ito and Hiroshi Miyasaka
中科院分区:
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文献类型:
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作者:
32.Satoshi Takei;Akihiro Oshima;Takumi Ichikawa;Atsushi Sekiguchi;Miki Kashiwakura;Takahiro Kozawa;Seiichi Tagawa;Tomoko G. Oyama;Syoji Ito and Hiroshi Miyasaka

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