Optimization of wafer orientation and electrode materials for LGS high-temperature SAW sensors
Optimization of wafer orientation and electrode materials for LGS high-temperature SAW sensors
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LGS 高温 SAW 传感器的晶圆取向和电极材料优化
DOI：
10.1109/ultsym.2012.0381
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发表时间：
--
期刊：
影响因子：
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通讯作者：
S. Zhgoon
中科院分区：
文献类型：
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作者：
S. Sakharov;A. Zabelin;S. Kondratiev;D. Roshchupkin;D. Richter;H. Fritze;A. Shvetsov;S. Zhgoon
在 LGS 上制造了不同设计和不同谐振频率的谐振器。谐振器在 650°C 的温度下进行了研究。 LGS 传感器在熔炉中进行了 1000 小时的退火。获得了谐振器行为与温度的依赖性。研究发现，前 100-300 小时的热退火会导致谐振器特性发生最大的变化，而接下来的几个小时内的进一步变化要小得多。 Pt/Ti 基谐振器和 Ir 基谐振器表现出缓慢的老化趋势，而用厚度为 160 nm 的 Al2O3 薄膜钝化的 Pt/Ti 谐振器表现出更陡峭的初始频率变化。尽管电极受到明显损坏，但谐振器特性对于此类退化仍然相当稳健，并清楚地证明了使用基于 LGS 的 SAW 传感器结构进行长期测量的可能性。结果表明，需要对高温传感器进行初始退火以稳定其老化行为。使用 XRD 技术，我们观察了 SAW 谐振器的 Ir 和 Pt 电极在热退火的前 100 小时内的氧化过程。
Resonators with different designs and different resonance frequencies were fabricated on LGS. Resonators were studied at a temperature of 650°C. Annealing of LGS sensors was carried out in a furnace during 1000 hours. Dependences of the resonators behavior versus temperature were obtained. It was found that the first 100-300 hours of thermal annealing lead to the largest change in resonator properties, while further changes over the next hours are much smaller. Pt/Ti based resonators and Ir based resonators showed slow ageing trends, while Pt/Ti resonators passivated with an Al2O3thin film with a thickness of 160 nm demonstrated steeper initial frequency changes. In spite of the obvious damage to electrodes, resonator properties remained reasonably robust to such kinds of degradation and clearly proved the possibility of long-term measurements with LGS based SAW sensor structures. The results showed that initial annealing of high temperature sensors is required to stabilize their ageing behavior. Using the XRD technique, we observed the process of oxidation of Ir and Pt electrodes of SAW-resonators during the first 100 hours of thermal annealing.
基于 LGS 晶体的高温 SAW 传感器的 X 射线衍射研究
DOI：
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发表时间：
2011
期刊：
影响因子：
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作者：
S. Sakharov;D. Roshchupkin;E. Emelin;D. Irzhak;O. Buzanov;A. Zabelin
通讯作者：
A. Zabelin
DOI：
10.1109/ultsym.2010.5935533
发表时间：
2010-10
期刊：
2010 IEEE International Ultrasonics Symposium
影响因子：
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作者：
S. Sakharov;S. Kondratiev;A. Zabelin;N. Naumenko;A. Azarov;S. Zhgoon;A. Shvetsov
通讯作者：
S. Sakharov;S. Kondratiev;A. Zabelin;N. Naumenko;A. Azarov;S. Zhgoon;A. Shvetsov