High-throughput heterodyne thermoreflectance: Application to thermal conductivity measurements of a Fe-Si-Ge thin film alloy library.
High-throughput heterodyne thermoreflectance: Application to thermal conductivity measurements of a Fe-Si-Ge thin film alloy library.
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DOI：
10.1063/1.4986469
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发表时间：
2017-07
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通讯作者：
Quentin d'Acremont;G. Pernot;J. Rampnoux;A. Furlan;D. Lacroix;A. Ludwig;S. Dilhaire
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文献类型：
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作者：
Quentin d'Acremont;G. Pernot;J. Rampnoux;A. Furlan;D. Lacroix;A. Ludwig;S. Dilhaire
开发了一种高分辨率时域热反射（HT-TDTR）技术，以执行快速热导率测量，只需最少的用户操作。这种新的设置是基于外差皮秒热反射系统。使用两个不同的激光振荡器已被证明，以减少两个数量级的采集时间，并避免通常由移动存在于TDTR系统中的元件引起的实验伪影。包括与锁定检测方案相关联的幅度调制以保持对热特性的高灵敏度。我们证明了HT-TDTR设置的能力，以执行高通量的热分析映射的热导率和界面电阻的三元薄膜硅化物库FexSiyGe 100-x-y（20<x，y<80）的楔形多层方法沉积在直径为100 mm的蓝宝石晶片提供超过300个分析区域的不同的三元合金成分。
A High-Throughput Time-Domain ThermoReflectance (HT-TDTR) technique was developed to perform fast thermal conductivity measurements with minimum user actions required. This new setup is based on a heterodyne picosecond thermoreflectance system. The use of two different laser oscillators has been proven to reduce the acquisition time by two orders of magnitude and avoid the experimental artefacts usually induced by moving the elements present in TDTR systems. An amplitude modulation associated to a lock-in detection scheme is included to maintain a high sensitivity to thermal properties. We demonstrate the capabilities of the HT-TDTR setup to perform high-throughput thermal analysis by mapping thermal conductivity and interface resistances of a ternary thin film silicide library FexSiyGe100-x-y (20<x,y<80) deposited by wedge-type multi-layer method on a 100 mm diameter sapphire wafer offering more than 300 analysis areas of different ternary alloy compositions.