Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis
Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis
复制标题
DOI：
10.1063/1.3657156
复制
发表时间：
2011-11-01
影响因子：
1.6
通讯作者：
Ohashi, H.
中科院分区：
文献类型：
--
作者：
Horiba, K.;Nakamura, Y.;Ohashi, H.
为了实现固体三维空间分辨电子结构的无损观察，我们已经开发了一种扫描光电子显微镜系统，具有深度剖析的能力，在电子能谱化学分析（ESCA）。我们称这个系统为3D纳米ESCA。为了聚焦X射线，使用直径为200 μ m且最外区宽度为35 nm的菲涅耳波带片。为了在不旋转样品的情况下获得深度剖面分析的光电子能谱的角度依赖性，我们采用了具有60度接收角的改进的VG Scienta R3000分析仪作为高分辨率角分辨电子能谱仪。该系统已安装在东京大学材料科学分站光束线，BL 07 LSU，在SPring-8。从多晶硅/高k栅极图案的线扫描轮廓的结果，我们实现了优于70 nm的总空间分辨率。我们的系统的能力，精确的深度剖面分析和高分辨率的化学状态分析证明。(C)2011年美国物理学会。[doi 10.1063/1.3657156]
In order to achieve nondestructive observation of the three-dimensional spatially resolved electronic structure of solids, we have developed a scanning photoelectron microscope system with the capability of depth profiling in electron spectroscopy for chemical analysis (ESCA). We call this system 3D nano-ESCA. For focusing the x-ray, a Fresnel zone plate with a diameter of 200 mu m and an outermost zone width of 35 nm is used. In order to obtain the angular dependence of the photoelectron spectra for the depth-profile analysis without rotating the sample, we adopted a modified VG Scienta R3000 analyzer with an acceptance angle of 60 degrees as a high-resolution angle-resolved electron spectrometer. The system has been installed at the University-of-Tokyo Materials Science Outstation beamline, BL07LSU, at SPring-8. From the results of the line-scan profiles of the poly-Si/high-k gate patterns, we achieved a total spatial resolution better than 70 nm. The capability of our system for pinpoint depth-profile analysis and high-resolution chemical state analysis is demonstrated. (C) 2011 American Institute of Physics. [doi:10.1063/1.3657156]