An Intense Pulsed Atomic Hydrogen Beam Source
An Intense Pulsed Atomic Hydrogen Beam Source
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强脉冲原子氢束源
DOI：
10.1143/jjap.39.6101
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发表时间：
2000
期刊：
影响因子：
--
通讯作者：
H. Fukutani
中科院分区：
文献类型：
--
作者：
A. Kubo;M. Kitajima;M. Yata;H. Fukutani
脉冲原子氢束源专门用于表面反应的研究。原子氢是通过石英管中的微波放电产生的，并通过差动泵浦级准直为光束。氢解离率约为70%，束流通量为4×1014atoms·cm-2·s-1，光斑直径为7mm。使用机械圆盘斩波器对光束进行斩波，获得 50 µs 的脉冲持续时间和 100 个脉冲/秒的重复率。原子氢束的速度分布符合位移麦克斯韦-玻尔兹曼分布，给出的最可能速度为 2410 m/s，束流温度为 70 K。
A pulsed atomic hydrogen beam source has been developed especially for studies of surface reactions. Atomic hydrogen is generated using a microwave discharge in a quartz tube and is collimated to a beam by differentially pumped stages. A hydrogen dissociation fraction of ∼70% and a beam flux of 4×1014 atoms·cm-2·s-1 with a spot size 7 mm in diameter are obtained. The beam is chopped with a mechanical disk chopper, and a pulse duration of 50 µs for a repetition rate of 100 pulses/s is obtained. The velocity distribution of the atomic hydrogen beam is fitted with a shifted Maxwell-Boltzmann distribution that gives a most probable velocity of 2410 m/s and a beam temperature of 70 K.