Structural, morphological and local electric properties of TiO2 thin films grown by pulsed laser deposition
Structural, morphological and local electric properties of TiO2 thin films grown by pulsed laser deposition
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DOI：
10.1088/0022-3727/40/17/035
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发表时间：
2007-08
期刊：
影响因子：
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通讯作者：
E. Gyorgy;Á. D. Pino;G. Sauthier;Albert Figueras;F. Alsina;J. Pascual
中科院分区：
文献类型：
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作者：
E. Gyorgy;Á. D. Pino;G. Sauthier;Albert Figueras;F. Alsina;J. Pascual
采用反应脉冲激光沉积（PLD）技术在（1 0 0）Si衬底上制备了TiO 2薄膜。采用四倍频Nd：YAG（λ = 266 nm，τFWHM <$5 ns，ν = 10 Hz）激光源辐照金属钛靶。实验在受控氧气气氛中进行。采用X射线衍射、显微拉曼光谱和电流传感原子力显微镜对氧化物薄膜的结晶度、表面形貌和局部电学性质进行了研究。发现了表面形貌、晶体结构和纳米级电性能之间的相互关系，这为通过PLD技术合成具有可调功能特性的TiO 2薄膜提供了可能性，该TiO 2薄膜可用于未来的应用，如光催化剂、气体传感器或太阳能转换器。
Titanium dioxide (TiO2) thin films were synthesized on (1 0 0) Si substrates by reactive pulsed laser deposition (PLD) technique. A frequency quadrupled Nd : YAG (λ = 266 nm, τFWHM ≅ 5 ns, ν = 10 Hz) laser source was used for the irradiations of metallic Ti targets. The experiments were performed in controlled oxygen atmosphere. Crystallinity, surface morphology and local electric properties of the obtained oxide thin films were investigated by x-ray diffractometry, micro-Raman spectroscopy and current sensing atomic force microscopy. An inter-relation was found between the surface morphology, the crystalline structure and the nano-scale electric properties which open the possibility of synthesizing by the PLD technique TiO2 thin films with tunable functional properties for future applications such as photocatalysts, gas sensors or solar energy converters.