Application of the kinetic and continuum Techniques to the multi-scale flows in MEMS Devices
Application of the kinetic and continuum Techniques to the multi-scale flows in MEMS Devices
复制标题
动力学和连续介质技术在 MEMS 器件多尺度流中的应用
DOI:
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发表时间:
2005
期刊:
影响因子:
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通讯作者:
Deborah Levin Fliflet
中科院分区:
文献类型:
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作者:
E. Titov;Michael Zeifman;Deborah Levin Fliflet