Fabrication of Yb-doped silica glass through the modification of MCVD process
Fabrication of Yb-doped silica glass through the modification of MCVD process
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DOI：
10.1016/j.jnoncrysol.2008.04.045
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发表时间：
2008-11
影响因子：
3.5
通讯作者：
E. Sekiya;P. Barua;Kazuya Saito;A. Ikushima
中科院分区：
文献类型：
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作者：
E. Sekiya;P. Barua;Kazuya Saito;A. Ikushima
提出了一种将Yb和Al化合物以气相形式输送到反应/沉积区的方法，用于改进的化学气相沉积（MCVD）工艺。通过使用这种MCVD装置，我们成功地制备了二氧化硅玻璃预制件，在径向和纵向方向上呈现均匀的掺杂剂浓度，具有良好的再现性。芯直径大于5 mm的预成型体通过沉积约40层而容易地制备。通过改变沉积过程中的载气流量、Yb（Yb）3和AlCl 3炉的温度等参数，在石英玻璃预制棒的芯区引入不同浓度的Yb和Al。通过调整Yb和Al的浓度，成功制备了折射率变化小于10%的大模场面积光纤预制棒。
A method to deliver Yb and Al compounds in vapor phase to the reaction/deposition zone has been devised for modified chemical vapor deposition (MCVD) process. By using this MCVD setup, we succeeded to prepare silica glass preforms presenting uniform dopants concentrations in the radial and longitudinal directions with good reproducibility. Preforms with a core diameter larger than 5mm were easily prepared by depositing around 40 layers. By changing some parameters in the deposition step, such as carrier gases flow and temperatures of Yb(DPM)3and AlCl3furnaces, different concentrations of Yb and Al were incorporated into the core region of the silica glass preforms. By adjusting the Yb and Al concentrations, we succeeded to prepare preforms for large mode area (LMA) fiber with a change less than 10% of nominal refractive index.