Nanoladder Cantilevers Made from Diamond and Silicon
Nanoladder Cantilevers Made from Diamond and Silicon
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DOI：
10.1021/acs.nanolett.7b05035
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发表时间：
2018-03-01
期刊：
影响因子：
10.8
通讯作者：
Degen, C. L.
中科院分区：
文献类型：
--
作者：
Heritier, M.;Eichler, A.;Degen, C. L.
我们提出了一个“纳米梯子”的几何形状，最大限度地减少了超灵敏度的杠杆的机械耗散。纳米梯子悬臂由特征尺寸类似于100 nm的轨道和横档的光刻图案化支架组成。与相同尺寸的矩形梁相比，纳米梯子的质量和弹簧常数分别减少了大约2个数量级。我们证明了在100-150 mK之间的温度下测量的由硅和金刚石制成的器件在1 Hz带宽中分别为158（-42）（+62）zN和190（-33）（+42）zN的低力噪声。与纳米线或纳米管等自下而上的机械谐振器相反，纳米阶梯悬臂梁可以使用标准光刻法批量制造，这是扫描力显微镜应用的关键因素。
We present a "nanoladder" geometry that minimizes the mechanical dissipation of ultrasensitive cantilevers. A nanoladder cantilever consists of a lithographically patterned scaffold of rails and rungs with feature size similar to 100 nm. Compared to a rectangular beam of the same dimensions, the mass and spring constant of a nanoladder are each reduced by roughly 2 orders of magnitude. We demonstrate a low force noise of 158(-42)(+62) zN and 190(-33)(+42) zN in a 1 Hz bandwidth for devices made from silicon and diamond, respectively, measured at temperatures between 100-150 mK. As opposed to bottom-up mechanical resonators like nanowires or nanotubes, nanoladder cantilevers can be batch fabricated using standard lithography, which is a critical factor for applications in scanning force microscopy.