Microactuation and sensing using reversible deformations of laser-written polymeric structures
Microactuation and sensing using reversible deformations of laser-written polymeric structures
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DOI：
10.1088/1361-6528/aa5d4d
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发表时间：
2017-03-24
期刊：
影响因子：
3.5
通讯作者：
Mizeikis, V.
中科院分区：
文献类型：
--
作者：
Rekstyte, S.;Paipulas, D.;Mizeikis, V.
我们研究了聚合物微结构的可逆变形，采用激光直写三维光刻技术制作的聚合物微结构浸泡在各种溶剂中。亚微米尺寸特征的膨胀和收缩是由与周围溶剂的相互作用引起的，并且这种变形可以用来产生更大的结构，其尺寸、形状和其他结构参数取决于周围环境。我们描述了衍射光学元件，微机械传感器和混合可变形结构，可用于实现微致动，微传感，和其他功能高度寻求微光学，微机械和微流体系统。
We investigate reversible deformations of polymeric microstructures fabricated using direct laser writing three-dimensional lithography upon immersion in various solvents. Swelling and shrinkage of sub-micrometre size features are induced by interaction with surrounding solvent and such deformations can be exploited to create larger structures whose size, shape, and other structural parameters depend on the surroundings. We describe diffractive optical elements, micro-mechanical sensors and also hybrid deformable structures, that can be used to implement micro-actuation, micro-sensing, and other functionalities highly sought for micro-optical, micromechanical, and micro-fluidic systems.