Large 1D and 2D micro-mirror arrays for universe and Earth observation
Large 1D and 2D micro-mirror arrays for universe and Earth observation
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用于宇宙和地球观测的大型一维和二维微镜阵列
DOI：
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发表时间：
2019
期刊：
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通讯作者：
M. Despont
中科院分区：
文献类型：
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作者：
F. Zamkotsian;Y. Petremand;P. Lanzoni;S. Lani;R. Barette;B. Timotijevic;M. Despont
在未来的宇宙和地球观测空间飞行任务中，可以使用MOEMS设备优化科学回报。大口径阵列（MMA）被用于设计新一代仪器。在宇宙观测中，多目标摄谱仪（MOS）是空间和地面望远镜研究星系形成和演化的有力工具。这项技术需要一个可编程的狭缝掩模来选择天文对象; 2D阵列非常适合这项任务。在对地观测中，利用一维微镜阵列构成的智能狭缝作为选通器件，可以实现光谱仪入口处杂散光的动态去除。我们目前正在欧洲开发微镜阵列，称为MIRA，在表面质量以及在低温下工作的能力方面表现出卓越的性能。成功地设计、制作了100 × 200 μm2单晶硅微镜，并在162 K温度下进行了测试。为了填充大的焦平面（几个芯片的镶嵌），我们目前正在开发与其电子产品集成的大型MEMS阵列。1D和2D阵列构建在具有晶片通孔的晶片上，以允许在晶片背面上路由器件，从而与专用ASIC集成。这些设备的产量以及对比度增强已成功实施。
In future space missions for Universe and Earth Observation, scientific return could be optimized using MOEMS devices. Large micromirror arrays (MMA) are used for designing new generation of instruments. In Universe Observation, multi-object spectrographs (MOS) are powerful tools for space and ground-based telescopes for the study of the formation and evolution of galaxies. This technique requires a programmable slit mask for astronomical object selection; 2D micromirror arrays are perfectly suited for this task. In Earth Observation, removing dynamically the straylight at the entrance of spectrographs could be obtained by using a Smart Slit, composed of a 1D micro-mirror array as a gating device. We are currently engaged in a European development of micro-mirror arrays, called MIRA, exhibiting remarkable performances in terms of surface quality as well as ability to work at cryogenic temperatures. MMA with 100 × 200 μm2 single-crystal silicon micromirrors were successfully designed, fabricated and tested down to 162 K. In order to fill large focal planes (mosaicing of several chips), we are currently developing large micromirror arrays to be integrated with their electronics. 1D and 2D arrays are built on wafer with Through Wafer Vias in order to allow routing of the device on wafer backside, foreseeing integration with dedicated ASICs. The yield of these devices as well as contrast enhancement have been successfully implemented.