MOSFET nonvolatile memory with a high-density tungsten nanodot floating gate formed by self-assembled nanodot deposition

MOSFET nonvolatile memory with a high-density tungsten nanodot floating gate formed by self-assembled nanodot deposition
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具有自组装纳米点沉积形成的高密度钨纳米点浮栅的 MOSFET 非易失性存储器

DOI:
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发表时间:
2009
期刊:
Semiconductor Science and Technology 24
影响因子:
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通讯作者:
Y. Pei
Y. Pei
中科院分区:
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文献类型:
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作者:
Yanli Pei;Chengkuan Yin;Masahiko Nishijima;Toshiya Kojima;Takafumi Fukushima;Tetsu Tanaka;and Mitsumasa Koyanagi;Yanli Pei;Y. Pei

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