Formation of Laser-Induced Periodic Surface Structures on Reaction-Bonded Silicon Carbide by Femtosecond Pulsed Laser Irradiation
Formation of Laser-Induced Periodic Surface Structures on Reaction-Bonded Silicon Carbide by Femtosecond Pulsed Laser Irradiation
复制标题
DOI：
10.1007/s41871-023-00184-8
复制
发表时间：
2023-03
影响因子：
--
通讯作者：
T. Meshram;Jiwang Yan
中科院分区：
文献类型：
--
作者：
T. Meshram;Jiwang Yan
反应烧结碳化硅（RB-SiC）是一种优异的工程材料，具有高硬度、高刚度和耐化学磨损。然而，由于上述特性，其广泛使用受到阻碍，难以通过机械和化学方法加工功能表面结构。本研究通过波长 1028 nm 的飞秒脉冲激光照射，研究了 RB-SiC 上激光诱导周期性表面结构 (LIPSS) 的基本特性。沿垂直于激光偏振的方向在表面上形成低空间频率 LIPSS (LSFL) 和高空间频率 LIPSS (HSFL)。被大量 Si 包围的 SiC 晶粒显示出 LIPSS 形成阈值降低。通过改变激光注量和扫描速度，在 SiC 晶粒上生成了 HSFL-LSFL 混合结构。通过透射电子显微镜观察和拉曼光谱来了解混合 LIPSS 的形成机制。提出了一种基于 SiC 非线性响应产生多个表面电磁波的可能机制来解释混合结构的形成。此外，激光扫描相对于激光偏振的方向会影响生成的 LIPSS 的均匀性。
Reaction-bonded silicon carbide (RB-SiC) is an excellent engineering material with high hardness, stiffness, and resistance to chemical wear. However, its widespread use is hindered due to the properties mentioned above, making it difficult to machine functional surface structures through mechanical and chemical methods. This study investigated the fundamental characteristics of laser-induced periodic surface structures (LIPSSs) on RB-SiC via femtosecond pulsed laser irradiation at a wavelength of 1028 nm. Low-spatial-frequency LIPSS (LSFL) and high-spatial-frequency LIPSS (HSFL) formed on the surface along directions perpendicular to the laser polarization. SiC grains surrounded by a large amount of Si show a reduced threshold for LIPSS formation. By varying laser fluence and scanning speed, HSFL–LSFL hybrid structures were generated on the SiC grains. Transmission electron microscopy observations and Raman spectroscopy were carried out to understand the formation mechanism of the hybrid LIPSS. A possible mechanism based on the generation of multiple surface electromagnetic waves due to the nonlinear response of SiC was proposed to explain the hybrid structure formation. Furthermore, the direction of laser scanning with respect to laser polarization affects the uniformity of the generated LIPSS.