Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers
Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers
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聚合物上原子层沉积生长的薄膜 Al2O3 早期生长对透湿性的影响
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
J. Wyre
中科院分区：
文献类型：
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作者：
P. Carcia;R. S. Mclean;D. J. Walls;M. Reilly;J. Wyre
作者研究了通过原子层沉积 (ALD) 在商用聚对苯二甲酸乙二醇酯 (PET) 薄膜（杜邦帝人薄膜公司，切斯特，弗吉尼亚州）的两个化学性质不同的表面上生长的 Al2O3 阻隔薄膜的透湿性。一个表面是“裸露”的 PET 聚合物，而另一表面则涂有低摩擦“滑动”层，以方便卷筒上聚合物薄膜的卷绕和退绕。对于早期 Al2O3 薄膜生长（<8nm），作者发现裸露聚合物侧的水分渗透率低于滑移侧，但对于较厚的薄膜收敛到相同的仪器极限值（∼1 × 10−4 g H2O/m2·天）。然而，在 60°C/85% RH 的长期 Ca 测试中，在滑移侧生长的较厚阻隔膜经历了突然的渗透突破，而在裸露 PET 侧同等生长的阻隔膜则保持稳定。在沉积 Al2O3 之前，在 Ar 中轻微蚀刻滑移面，其渗透性能相当于在裸露的聚合物面上生长的屏障。特...
The authors investigated moisture permeation for Al2O3 barrier films grown by atomic layer deposition (ALD) on the two individual chemically distinct surfaces of a commercial (DuPont Teijin Films, Chester, VA) polyethylene terephthalate (PET) film. One surface is “bare” PET polymer, whereas the opposite surface is coated with a low friction “slip” layer to facilitate winding and unwinding of the polymer film on a roll. For early stage Al2O3 film growth (<8 nm), the authors found that moisture permeation was less on the bare polymer side than the slip side but converged to same instrument limited value (∼1 × 10−4 g H2O/m2 day) for thicker films. However, thicker barrier films grown on the slip side experienced abrupt permeation breakthrough in longer-term Ca-testing at 60 °C/85% RH, whereas equivalently grown barrier films on the bare PET-side were stable. Mildly etching the slip side in Ar, before depositing Al2O3, resulted in permeation performance equivalent to barriers grown on the bare polymer side. T...