Simple fabrication technique of distributed-feedback polymer laser by direct photonanoimprint lithography
Simple fabrication technique of distributed-feedback polymer laser by direct photonanoimprint lithography
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DOI：
10.1063/1.2945632
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发表时间：
2008-06
影响因子：
4
通讯作者：
K. Yamashita;M. Arimatsu;M. Takayama;K. Oe;H. Yanagi
中科院分区：
文献类型：
--
作者：
K. Yamashita;M. Arimatsu;M. Takayama;K. Oe;H. Yanagi
介绍了一种利用光刻技术制作聚合物分布反馈激光器的方法。在具有光栅结构的器件中，光栅结构在真空中直接压印到有源层表面上，很容易获得单模激光振荡。通过改变母模的掺杂材料和光栅周期，可以控制分布反馈激光器的发射颜色。指出纳米压印光刻技术将成为微电子光源发展的关键技术。
This paper describes a fabrication technique of polymeric distributed-feedback lasers using the photonanoimprint lithography. In devices with a grating structure, which was imprinted directly onto the active layer surface in vacuum, single-mode laser oscillations were easily obtained. The emission color of the distributed-feedback laser can be controlled only by changing doping material and grating period of the master mold. It was demonstrated that the nanoimprint lithography would be a key technology for development of a multicolor light source.