Design rules to minimize the effect of joule heating in Greek cross test structures
Design rules to minimize the effect of joule heating in Greek cross test structures
复制标题
最小化希腊交叉测试结构中焦耳热影响的设计规则
DOI：
10.1109/tsm.2004.826961
复制
发表时间：
2004
影响因子：
2.7
通讯作者：
A. Walton
中科院分区：
文献类型：
--
作者：
S. Enderling;M.H. Dicks;S. Smith;J. Stevenson;A. Walton
本文分析了焦耳加热对使用希腊交叉测试结构测量方块电阻率的影响。作为这项工作的一部分，已经推导出了设计规则，以最大限度地减少与测量过程中的强迫电流相关的加热效应。为了实现这一点，采用有限元(FE)模拟来确定热产生和冷却机制在结构中的位置。这表明，可以通过以下方法将温度降至最低：第一，减小交叉臂长度，从而减小臂的电阻和热阻；第二，通过集成衬垫和引线来改善散热器效果。四种不同希腊十字设计的方阻测量证实了这些结果，表明所提出的设计规则减少了焦耳加热对方阻测量的影响，最高可达25%。
This paper presents work on the analysis of the effect of Joule heating on sheet resistivity measurements using Greek cross test structures. As part of this work, design rules have been derived to minimize the heating effect associated with currents forced during their measurement. To accomplish this, finite-element (FE) simulations were employed to identify the location of heat generation and cooling mechanisms in the structures. This identified that the temperature could be minimized by: firstly, decreasing cross arm length, and therefore both electrical and thermal resistance of the arms; and secondly, by integrating pads and leads to improve the heat sink effect. These results were confirmed by sheet resistance measurements of four different Greek cross designs which demonstrated that the proposed design rules reduced the Joule heating effects on the sheet resistance measurements by up to 25%.