Crystallographic anisotropy of growth and etch rates of CVD diamond
Crystallographic anisotropy of growth and etch rates of CVD diamond
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CVD 金刚石生长和蚀刻速率的晶体各向异性
DOI:
10.1016/j.diamond.2008.11.034
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发表时间:
2009
影响因子:
4.1
通讯作者:
C. Wild
中科院分区:
文献类型:
--
作者:
M. Wolfer;J. Biener;B. El;M. Biener;A. Hamza;A. Kriele;C. Wild