A novel microfluidic driver via AC electrokinetics
A novel microfluidic driver via AC electrokinetics
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DOI：
10.1039/b719968f
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发表时间：
2008-01-01
期刊：
影响因子：
6.1
通讯作者：
Liu, Cheng-Hsien
中科院分区：
文献类型：
--
作者：
Kuo, Ching-Te;Liu, Cheng-Hsien
基于非对称电容/化学调制微电极阵列诱导的交流电渗流动，研制了一种新型交流电动微流体驱动器。非对称电容调制（ACM）由梳状电极阵列制成，并且各个电极表面的部分用SiO2介电层调制/沉积。该设计可用于将最大速度的最佳操作频率移动到更高的频率，以最小化电解气泡的产生并提高微泵送性能。在本文中描述的泵浦速度，测量通过跟踪微珠，是一个功能的施加电位，信号频率，缓冲液浓度，和介电层厚度。在5 mM缓冲溶液中，外加电位为10 Vpp时，最大抽速可达290 μ m·s（-1），最大流速可达26.1 μ l·h（-1）。这是第一次成功的示范无气泡交流电动微泵通过这种不对称的电容调制电极阵列。设计，模拟，微加工，实验结果和理论模型的描述，本文的特点和表现出的性能，提出了新的无气泡交流电动微流控驱动器。
A novel ac electrokinetic microfluidic driver based on alternating current electro-osmosis flow induced by asymmetrically capacitance/chemistry-modulated microelectrode arrays has been successfully developed and demonstrated. Asymmetric capacitance modulation (ACM) is made of comb electrode arrays and parts of individual electrode surfaces are modulated/deposited with a SiO2 dielectric layer. This proposed design can be utilized to shift the optimal operation frequency of maximum velocity to a higher frequency to minimize electrolytic bubble generation and enhance micropumping performance. The pumping velocity, described in this paper, is measured via the tracing of microbeads and is a function of applied potential, signal frequency, buffer concentration, and dielectric layer thickness. A maximum pumping velocity up to 290 mu m s(-1) in 5 mM buffer solution with the applied potential of 10 Vpp is observed in our prototype device, and the estimated maximum flow rate is up to 26.1 mu l h(-1). This is the first successful demonstration regarding bubble-free ac electrokinetic micropumping via such asymmetrically capacitance-modulated electrode arrays. Design, simulation, microfabrication, experimental result, and theoretical model are described in this paper to characterize and exhibit the performance of the proposed novel bubble-free ac electrokinetic microfluidic driver.