Optical IMEMS/sup /spl reg//-a fabrication process for MEMS optical switches with integrated on-chip electronics
Optical IMEMS/sup /spl reg//-a fabrication process for MEMS optical switches with integrated on-chip electronics
复制标题
光学 IMEMS/sup /spl reg//-具有集成片上电子器件的 MEMS 光开关的制造工艺
DOI：
10.1109/sensor.2003.1217096
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
M. Davis
中科院分区：
文献类型：
--
作者：
T. Brosnihan;S.A. Brown;A. Brogan;C. Gormley;D. Collins;S. Sherman;M. Lemkin;N. Polce;M. Davis
硅微机械加工生产小型、精密、可移动部件的能力为MEMS组件在光通信网络中的应用提供了机会。为了应对这一潜在市场，ADI公司开发了光学iMEMS/sup /spl reg//工艺，用于制造集成片上电子器件的MEMS光学元件。虽然这个过程可以用来制造各种光学元件，包括反射镜，快门和致动器，以实现精确对准，但我们在这里报告的是用于光学开关的MEMS反射镜。该器件由一个双万向架反射镜和片上高压驱动电子器件以及用于电容位置检测的低压CMOS组成。反射镜可以绕X轴和Y轴倾斜，在两个倾斜方向上都有位置感测。
The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks. To address this potential market, Analog Devices has developed the Optical iMEMS/sup /spl reg// process for fabricating MEMS optical components with integrated, on-chip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the X- and Y-axis, with position sense in both directions of tilt.