Mode II adhesion energy analysis of stiction-failed poly-Si $\mu$ cantilevers using a MEMS load cell
Mode II adhesion energy analysis of stiction-failed poly-Si $\mu$ cantilevers using a MEMS load cell
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使用 MEMS 称重传感器对粘滞失效多晶硅 $mu$ 悬臂梁进行模式 II 粘附能分析
DOI：
10.1088/1361-6439/ab173e
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发表时间：
2019
影响因子：
2.3
通讯作者：
Leseman, Zayd Chad
中科院分区：
文献类型：
--
作者：
Mousavi, Behnam Kheyraddini;Mousavi, Arash Kheyraddini;Hieber, Tyler Jordan;Chen, James;Leseman, Zayd Chad
本文研究了多晶硅悬臂梁在多晶硅衬底上的II型粘附能。使用定制的弯曲微机电系统（MEMS）称重传感器和干涉仪来测量施加的力和实时测量挠度。根据这些数据，确定了II型应变能释放率在0.52 - 5.10 mJ m−2之间。
This paper studies the Mode II adhesion energy of a Poly-Si cantilever stiction failed on a poly-Si substrate. A custom flexural microelectromechanical systems (MEMS) load cell and an interferometer are used to measure the applied forces and measure the deflections in real time. From this data the Mode II strain energy release rates were determined to range between 0.520–5.10 mJ m− 2.