Influence of the bias voltage on the structure and the tribological performance of nanoscale multilayer C/Cr PVD coatings
Influence of the bias voltage on the structure and the tribological performance of nanoscale multilayer C/Cr PVD coatings
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DOI：
10.1016/j.tsf.2004.08.042
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发表时间：
2005-03-22
期刊：
影响因子：
2.1
通讯作者：
Petrov, I
中科院分区：
文献类型：
--
作者：
Kok, YN;Hovsepian, PE;Petrov, I
采用控制阴极弧/非平衡磁控溅射技术制备了C/Cr纳米多层膜。XRD结果表明，C/Cr涂层在低U-b时为非晶态，但当U-b增加到-350 V时，涂层变得更加晶态。高分辨XTEM分析表明，涂层致密化、光滑化，并形成了新型的非晶态纳米结构，其中富碳簇被富Cr基质包围，导致随着偏压从-65 V增加到-350 V而形成自组织多层结构。偏压从-65 V增加到-350 V导致硬度从8 CiPa增加到25 CiPa，杨氏模量E从186 GPa增加到319 GPa。销盘试验表明，当偏置电压从-65 V增加到-95 V时，摩擦系数从0.22降低到0.16。然而，偏置电压进一步增加到-350 V导致摩擦系数增加到0.31。在U-b =-120 V时，获得了类似于6.25 x 10（-17）m（3）N-1 m（-1）的最低磨损系数K（c）。使用固溶退火的AISI 304不锈钢作为工件材料，对直径为8 mm、涂有C/Cr涂层的标准HSS钻头进行了测试。与未涂覆的工具相比，寿命提高了约9倍。在该测试中，C/Cr涂层优于许多市售PVD涂层，例如TiCN、TiAlCrN，并且显示出与TiAlCrYN相似的性能。(C)2004 Elsevier B. V.保留所有权利。
Nanoscale multilayer C/Cr coatings have been deposited by utilising the combined steered cathodic arc/unbalanced magnetron sputtering technique. The coating microstructure and tribological performance have been investigated as a function of the bias voltage, ranging from U-b=-65 to -350 V. The XRD results revealed that C/Cr coatings are amorphous at low U-b, but became more crystalline when the Ub increased to -350 V. High-resolution XTEM analysis indicated coating densification and smoothening as well as formation of novel amorphous nanostructure, in which carbon-rich clusters are surrounded by a Cr-rich matrix, leading to the formation of self-organised multilayer structure as the bias voltage was increased from -65 to -350 V. An increase of the bias voltage from -65 to -350 V resulted in an increase in the hardness from 8 to 25 CiPa and Young's modulus, E from 186 to 319 GPa. A pin-on-disc test showed that the friction coefficient was reduced from 0.22 to 0.16 when the bias voltage was increased from -65 to -95 V However, a further increase in the bias voltage to -350 V led to an increase in the friction coefficient to 0.31. The lowest wear coefficient K(c)similar to6.25 x 10(-17) m(3) N-1 m(-1) was achieved at U-b = - 120 V. Standard HSS drills, 8 mm in diameter, coated with C/Cr have been tested using solution annealed AISI 304 stainless steel as the work piece material. An improvement of the lifetime by a factor of similar to9 has been achieved as compared to the uncoated tools. In this test, the C/Cr coating outperformed a number of commercially available PVD coatings, such as TiCN, TiAlCrN and showed similar performance to TiAlCrYN. (C) 2004 Elsevier B.V. All rights reserved.