A Comparative Study of Single and Double Langmuir Probe Techniques for RF Plasma Characterization
A Comparative Study of Single and Double Langmuir Probe Techniques for RF Plasma Characterization
复制标题
用于射频等离子体表征的单、双 Langmuir 探针技术的比较研究
DOI：
10.1002/ctpp.2150390305
复制
发表时间：
1999
影响因子：
1.6
通讯作者：
R. Mansano
中科院分区：
文献类型：
--
作者：
R. M. Castro;G. Cirino;P. Verdonck;H. Maciel;M. Massi;M. Pisani;R. Mansano
采用常规的双探针、带射频扼流圈的单探针和带补偿电极的单探针测量了射频等离子体的密度和电子温度。通过三个探针表征相同的等离子体，每个探针在每个等离子体条件下进行三次测量，以确定测量结果的精度。在进行了比较分析后，在这些结果的精度和准确性，结论是，双探头，它已经有最简单的结构的优势，产生最可靠的结果为电容和电感耦合RF等离子体。带射频扼流圈和补偿电极的单探头与不带补偿电极的单探头具有相似的精度，但其精度更高。
In this study, the plasma density and electron temperature of Radio Frequency (RF) plasmas were determined by three types of Langmuir probes, namely a conventional double probe, a single probe with RF choke and a single probe with RF choke and compensating electrode. The same plasmas were characterized by the three probes, each performing three measurements per plasma condition, in order to determine the precision of the measurement results. After performing a comparative analysis, which looked at the precision and the accuracy of these results, the conclusion is that the double probe, which has already the advantage of the simplest construction, yields the most reliable results for both capacitively and inductively coupled RF plasmas. The single probe with RF choke and compensating electrode has a similar precision as the single probe without compensating electrode, but its accuracy is better.