Correlating elemental distribution with mechanical properties of TiN/SiNx nanocomposite coatings
Correlating elemental distribution with mechanical properties of TiN/SiNx nanocomposite coatings
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DOI：
10.1016/j.scriptamat.2019.05.020
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发表时间：
2019-09-01
影响因子：
6
通讯作者：
Bartosik, M.
中科院分区：
文献类型：
--
作者：
Sperr, M.;Zhang, Z. L.;Bartosik, M.
详细的结构和化学分析表明，在高氮分压和温度下制备的Ti-Si-N涂层是由纳米尺寸（近等轴）的TiN微晶包裹在类似于1.0 nm薄的富硅组织相。这种纳米复合材料结构具有上级的硬度（37.6 +/- 1.5 GPa）和断裂韧性（4.5 +/- 0.6 MPa root m）。相反，在较低的氮分压和温度下的沉积不允许在膜生长期间的这种清晰的Si偏析，导致纳米尺寸的固溶体Ti 1-xSixN微晶。虽然具有8.5原子%的相同Si含量，它们的硬度（32.1 +/-0.9GPa）以及断裂韧性（3.0 +/-0.2MPa均方根m）明显较低。(C)2019 Acta Materialia Inc.爱思唯尔有限公司出版
Detailed structural and chemical analyses reveal that Ti-Si-N coatings prepared with high nitrogen partial pressure and temperature are composed of nm-sized (nearly equiaxed) TiN crystallites encapsulated by similar to 1.0 nm thin Si-rich tissue phase. This nanocomposite structure allows for superior hardness (37.6 +/- 1.5 GPa) and fracture toughness (4.5 +/- 0.6 MPa root m). Contrary, deposition at lower nitrogen partial pressure and temperature does not allow for such a clear Si segregation during film growth, leading to nm-sized solid solution Ti1-xSixN crystallites. Although having the same Si content of 8.5 at.%, their hardness (32.1 +/- 0.9 GPa) as well as fracture toughness (3.0 +/- 0.2 MPa root m) is significantly lower. (C) 2019 Acta Materialia Inc. Published by Elsevier Ltd.