Structure and mechanical properties of W incorporated diamond-like carbon films prepared by a hybrid ion beam deposition technique
Structure and mechanical properties of W incorporated diamond-like carbon films prepared by a hybrid ion beam deposition technique
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DOI：
10.1016/j.carbon.2005.12.045
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发表时间：
2006-08
期刊：
影响因子：
10.9
通讯作者：
Aiying Wang;Kwang-Ryeol Lee;Jae-pyoung Ahn;J. Han
中科院分区：
文献类型：
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作者：
Aiying Wang;Kwang-Ryeol Lee;Jae-pyoung Ahn;J. Han
采用端霍尔型碳氢离子枪和钨直流磁控溅射源组成的混合沉积系统，在（100）硅片上制备了含W类金刚石薄膜。通过改变Ar和C6 H6反应气体中Ar的比例来控制薄膜中W的浓度。研究了钨含量在0 ~ 8.6at.%范围内的化学成分、原子键结构和力学性能。当W浓度<2.8at.%时，W原子溶解在无定形碳基质中，而不形成WC 1-x相。当W含量> 2.8at. %和>3.6at.%时，出现非晶态和晶态WC 1 − x纳米颗粒，分别结果发现，硬度和弹性模量是不敏感的W浓度在此浓度范围内。另一方面，残余压应力强烈依赖于掺入的W原子的化学状态。在力学性能的变化进行了讨论，在由W掺入引起的微观结构的变化。
W incorporated diamond-like carbon films were prepared on silicon(100) wafers using a hybrid deposition system composed of an end-Hall-type hydrocarbon ion gun and a tungsten DC magnetron sputter source. The W concentration in the films was controlled by changing the fraction of Ar in the Ar and C6H6reaction gas. The chemical composition, atomic bond structure, and mechanical properties were investigated for W concentrations ranging from 0 to 8.6at.%. When the W concentration was <2.8at.%, the W atoms were dissolved in the amorphous carbon matrix without forming a WC1−xphase. Amorphous and crystalline WC1−xnano-particles appeared when the W concentration was >2.8 and >3.6at.%, respectively. It was found that the hardness and elastic modulus were not sensitive to the W concentration in this concentration range. On the other hand, the residual compressive stress was strongly dependent on the chemical state of the incorporated W atoms. The change in mechanical properties is discussed in terms of the microstructural changes induced by W incorporation.