Polarization dependence of the quasi-Talbot effect of the high-density grating.
Polarization dependence of the quasi-Talbot effect of the high-density grating.
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DOI：
10.1364/josaa.27.000366
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发表时间：
2010-03
期刊：
影响因子：
--
通讯作者：
Shuyun Teng;Wenzhen Guo;Chuan-fu Cheng
中科院分区：
文献类型：
--
作者：
Shuyun Teng;Wenzhen Guo;Chuan-fu Cheng
研究了TM和TE偏振照明下一维高密度光栅在近场的衍射现象，并利用时域有限差分技术计算了衍射强度分布。计算结果表明，不同偏振光照下高密度光栅的衍射效果不同。光栅的准塔尔伯特像取决于入射波的偏振，近场中光栅的准塔尔伯特像的存在条件也随着入射波的偏振而变化。我们根据能量流密度的矢量分布给出解释。这些对高密度光栅准Talbot成像偏振依赖性的研究有助于光栅在近场光刻中的应用。
Diffractions by the one-dimensional high-density grating in the near field with TM and TE polarization illuminations are studied, and the diffraction intensity distributions are calculated with the finite-difference time-domain technique. The calculation results show that the diffractions of the high-density grating with different polarization illuminations are different. The quasi-Talbot image of the grating depends on the polarization of the incident wave, and the existence condition of the quasi-Talbot image of the grating in the near field also changes with the polarization of the incident wave. We present explanations based on the vector distribution of the energy flow density. These studies on the polarization dependence of the quasi-Talbot imaging of the high-density grating are helpful for the application of the grating to near-field photolithography.