Annealing temperature effects on grain growth and properties of the ZrO2 buffered chromium nitride thin films

Annealing temperature effects on grain growth and properties of the ZrO2 buffered chromium nitride thin films
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退火温度对ZrO2缓冲氮化铬薄膜晶粒生长和性能的影响

DOI:
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发表时间:
2019
影响因子:
3.8
通讯作者:
Yuping Sun
Yuping Sun
中科院分区:
化学2区
文献类型:
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作者:
Xianwu Tang;Renhuai Wei;Ling Hu;Jie Yang;Wenhai Song;Jianming Dai;Xuebin Zhu;Yuping Sun

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