Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy
Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy
复制标题
使用扫描非线性介电显微镜测量介电薄膜中极性反转层状结构的方法
DOI：
10.1080/00150193.2016.1169493
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发表时间：
2016
期刊：
影响因子：
0.8
通讯作者：
Yasuo Cho
中科院分区：
文献类型：
--
作者：
Hiroyuki Odagawa;Koshiro Terada;Hiroaki Nishikawa;Takahiko Yanagitani;Yasuo Cho
提出了一种获得层状铁电和/或压电薄膜中极性反转结构深度分布的方法。它是通过使用扫描非线性介电显微镜进行非破坏性表面测量来实现的。给出了测量信号的计算结果，描述了深度分布的估计原理，它与测量探头的尖端半径和倒置层的深度有关。给出了射频磁控溅射制备的层状极性反转结构氧化锌薄膜的实验结果和薄膜的极性状态估计。
A method for obtaining a depth profile of polarity inverted structure in a layered ferroelectric and/or piezoelectric thin film is proposed. It is performed by surface measurement non-destructively using scanning nonlinear dielectric microscopy. We describe estimation principle for the depth profile with some calculation results of measurement signal, which is related to tip radius of the measurement probe and depth of the inverted layer. Also, experimental results in zinc oxide films which have layered polarity-inverted structure fabricated by radio frequency magnetron sputtering and the estimation of the polarity state on the films are shown.