An optimized nanoparticle separator enabled by electron beam induced deposition
An optimized nanoparticle separator enabled by electron beam induced deposition
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DOI：
10.1088/0957-4484/21/16/165303
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发表时间：
2010-04-23
期刊：
影响因子：
3.5
通讯作者：
Rack, P. D.
中科院分区：
文献类型：
--
作者：
Fowlkes, J. D.;Doktycz, M. J.;Rack, P. D.
基于尺寸的分离技术将不可避免地受益于纳米技术的进步。直接写入纳米制造提供了一种有用的机制，用于在传统纳米制造技术无法获得的环境中沉积/蚀刻纳米级元件。在这里，电子束诱导沉积被用来在3D环境中沉积一系列纳米尺度的特征，并且在束相互作用区域之外具有最小的材料邻近效应。具体地说，纳米颗粒分离器的膜组件是通过沉积具有单一间距的尖锐倾斜纳米微管的线性阵列来制造的，设计用于亚50 nm纳米颗粒的渗透性。纳米管膜以双重容量使用，以控制纳米颗粒在阵列的横轴方向上的流动，同时促进细胞大小的隔室在近轴方向上的密封。优化的生长配方(1)最大限度地提高了膜的生长效率(将邻近效应降至最低)，(2)保持了纳米柱间距的保真度(最大限度地提高了膜的基于尺寸的浇注质量)，同时(3)保持了锐利的纳米柱尖端，用于刺穿对器件密封至关重要的光学透明聚合物盖子。
Size-based separations technologies will inevitably benefit from advances in nanotechnology. Direct-write nanofabrication provides a useful mechanism for depositing/etching nanoscale elements in environments otherwise inaccessible to conventional nanofabrication techniques. Here, electron beam induced deposition was used to deposit an array of nanoscale features in a 3D environment with minimal material proximity effects outside the beam-interaction region. Specifically, the membrane component of a nanoparticle separator was fabricated by depositing a linear array of sharply tipped nanopillars, with a singular pitch, designed for sub-50 nm nanoparticle permeability. The nanopillar membrane was used in a dual capacity to control the flow of nanoparticles in the transaxial direction of the array while facilitating the sealing of the cellular-sized compartment in the paraxial direction. An optimized growth recipe resulted which (1) maximized the growth efficiency of the membrane (which minimizes proximity effects) and (2) preserved the fidelity of the spacing between nanopillars (which maximizes the size-based gating quality of the membrane) while (3) maintaining sharp nanopillar apexes for impaling an optically transparent polymeric lid critical for device sealing.