Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance Actuation

Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance Actuation
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DOI:
10.1109/mems49605.2023.10052378
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发表时间:
2023-01
期刊:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
影响因子:
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通讯作者:
Jianlin Chen;Hemin Zhang;T. Tsukamoto;M. Kraft;Shuji Tanaka
Jianlin Chen;Hemin Zhang;T. Tsukamoto;M. Kraft;Shuji Tanaka
中科院分区:
其他
文献类型:
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作者:
Jianlin Chen;Hemin Zhang;T. Tsukamoto;M. Kraft;Shuji Tanaka

文献摘要

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本文首次证明了模态局部化传感器在1:2内共振时刚度灵敏度的提高。两种模式局域模(反相(AP)和同相(IP)模,频率约为2ωr)可以通过利用内共振(IR)的非线性相互作用与转动模(ωr)同时耦合。当非线性驱动的AP运动与IP运动耦合时,可以在IP模式下观察到增强的模式耦合。从理论模型和实验结果两方面对这一概念进行了研究。一个平衡的AP运动的跳跃频率下产生的IR驱动。相反,当引入刚度扰动时,在IP模式下观察到较强的模式耦合。通过测量不同刚度扰动下IP模态的幅值比,发现刚度灵敏度提高了一个数量级,达到12400 /Δk/k。
In this paper, an enhanced stiffness sensitivity in a mode-localized sensor was demonstrated for 1:2 internal resonance (IR) for the first time. Two mode localized modes (anti-phase (AP) and in-phase (IP) modes, with frequencies around 2ωr) could be simultaneously coupled with the rotational mode (ωr) by a nonlinear interaction utilizing internal resonance (IR). When the nonlinear-actuated AP motion is coupled with the IP motion, an enhanced mode coupling can be observed at the IP mode. The concept was investigated by both theoretical model and experimental result. A balanced AP motion up to the jump frequency was generated under IR actuation. In contrast, a strong mode coupling was observed at the IP mode when the stiffness perturbation was introduced. By measuring the amplitude ratio of the IP mode for different stiffness perturbations, the stiffness sensitivity was found to be improved by an order of magnitude to 12400 /Δk/k.