Electron and excited particle densities in a carbon ablation plume
Electron and excited particle densities in a carbon ablation plume
复制标题
碳烧蚀羽流中的电子和激发粒子密度
DOI：
10.1016/s0169-4332(02)00379-3
复制
发表时间：
2002
影响因子：
6.7
通讯作者：
H. Sugawara
中科院分区：
文献类型：
--
作者：
M. Bratescu;Y. Sakai;Daisuke Yamaoka;Y. Suda;H. Sugawara
在准分子ArF激光产生的羽流中，测量了Ar气中激发态原子和电子的数密度以及烧蚀碳原子的膨胀速度，并与真空中的测量结果进行了比较。随着激光能量密度的增加，观察到C（31 P10）密度的饱和。这种饱和被证明是密切相关的电子密度饱和。Ar（4s′[1/2]10）和C（31 P10）的激发由电子碰撞解释，并依赖于气压和准分子激光能量密度。
In a plume produced by excimer ArF laser, the number densities of excited atoms and electrons, and the expansion velocity of ablated carbon atoms in an Ar gas were measured and compared with those obtained in vacuum. A saturation in C(31P10) density was observed as the laser fluence increased. This saturation was shown to be closely related to the electron density saturation. The excitation of Ar(4s′[1/2]10) and C(31P10) was interpreted by electron collisions and was dependent on gas pressure and excimer laser fluence.