Design and Fabrication Challenges of a Highly Sensitive Thermoelectric-Based Hydrogen Gas Sensor
Design and Fabrication Challenges of a Highly Sensitive Thermoelectric-Based Hydrogen Gas Sensor
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DOI：
10.3390/mi10100650
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发表时间：
2019-10-01
期刊：
影响因子：
3.4
通讯作者：
Lang, Walter
中科院分区：
文献类型：
--
作者：
Pranti, Anmona Shabnam;Loof, Daniel;Lang, Walter
本文介绍了一种用于催化式可燃气体检测的高灵敏度热电传感器。该传感器包含两个低应力（+176 MPa）膜，由化学计量和富硅氮化硅组合而成，使其具有化学和热稳定性。详细讨论了完整的制作过程，特别是挑战和解决方案。此外，设计标准的综合评价和不同的传感器设计的比较分析相对于膜上的温度场的均匀性，功耗和热灵敏度进行。评估各自的权衡，选择最佳设计。所选传感器具有线性热特性，灵敏度为6.54 mV/K。此外，膜上的温度分布是非常均匀的（20%的均方根标准偏差），这对于催化层的稳定性是重要的。最重要的是，具有配体（对苯二胺（PDA））连接的铂纳米颗粒催化剂的传感器显示出对氢气的异常高的响应，即，2%浓度下为752 mV。
This paper presents a highly sensitive thermoelectric sensor for catalytic combustible gas detection. The sensor contains two low-stress (+176 MPa) membranes of a combination of stoichiometric and silicon-rich silicon nitride that makes them chemically and thermally stable. The complete fabrication process with details, especially the challenges and their solutions, is discussed elaborately. In addition, a comprehensive evaluation of design criteria and a comparative analysis of different sensor designs are performed with respect to the homogeneity of the temperature field on the membrane, power consumption, and thermal sensitivity. Evaluating the respective tradeoffs, the best design is selected. The selected sensor has a linear thermal characteristic with a sensitivity of 6.54 mV/K. Additionally, the temperature profile on the membrane is quite homogeneous (20% root mean standard deviation), which is important for the stability of the catalytic layer. Most importantly, the sensor with a ligand (p-Phenylenediamine (PDA))-linked platinum nanoparticles catalyst shows exceptionally high response to hydrogen gas, i.e., 752 mV at 2% concentration.