Nano- and microstructure of diamond-like carbon films modified by Ca-O incorporation
Nano- and microstructure of diamond-like carbon films modified by Ca-O incorporation
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DOI：
10.1016/s0925-9635(02)00293-5
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发表时间：
2003-03-01
影响因子：
4.1
通讯作者：
Müller, E
中科院分区：
文献类型：
--
作者：
Dorner-Reisel, A;Schürer, C;Müller, E
研究了钙氧掺杂对Ti6Al4V基片上类金刚石(DLC)涂层的纳米结构和微观结构的影响。对于Ca-O-DLC的沉积，气态碳氢化合物前体(如甲烷)和CaO-H2O蒸气在等离子体中使用直流放电一起分解。与未改性的DLC相比，经Ca-O改性的DLC的硬度、杨氏模量和相对弹性回复率都有所降低。但是，Ca-O-DLC的粘附性得到了改善。在DLC涂层沉积过程中，随着CaO-H2O蒸气相对分压的增加，高分辨电子显微镜观察到的sp(2)杂化碳岛的尺寸增大，形状由椭圆形变为长达10 nm的条状。这一发现与拉曼光谱的结果很好地一致，拉曼光谱还表明非晶碳基质中的sp(2)杂化晶体碳团簇的大小和/或数量增加。除碳氢化合物外，DLC还由于CaO-H2O蒸气的分解而增加了氧含量。红外光谱和X-射线光电子能谱分析表明，钙以碳酸盐形式存在于类金刚石中。(C)2002 Elsevier Science B.V.保留所有权利。
In the present study, the nano- and microstructure of diamond-like carbon (DLC) coatings on Ti6Al4V substrates were changed by Ca-O incorporation. For the deposition of Ca-O-DLCs, a gaseous hydrocarbon precursor (e.g. methane) and CaO-H2O vapour were decomposed together in plasma using a direct current discharge. The hardness, Young's modulus and relative elastic recovery of Ca-O-modified DLCs are reduced in comparison to unmodified DLC. However, the adherence of the Ca-O-DLCs is improved. With increasing relative partial pressure of the CaO-H2O vapour during DLC coating deposition, the size of the sp(2)-hybridised carbon islands, which were observed via high-resolution transmission electron microscopy, increased and the shape changed from oval islands to strips of several 10 nm. This finding is in good accordance with the results from Raman spectroscopy, which also pointed to an increase in the size and/or number of sp(2)-hybridised crystalline carbon clusters in the amorphous carbon matrix. The DLCs have increased oxygen content due to the decomposition of CaO-H2O vapour, in addition to hydrocarbon. As detected by IR and X-ray photoelectron spectroscopy, Ca is incorporated as carbonate into the DLC. (C) 2002 Elsevier Science B.V. All rights reserved.