MgTiO3 (003) Thin Film Deposited on Sapphire (0001) by Sputtering
MgTiO3 (003) Thin Film Deposited on Sapphire (0001) by Sputtering
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通过溅射在蓝宝石 (0001) 上沉积 MgTiO3 (003) 薄膜
DOI：
10.1111/j.1551-2916.2010.04331.x
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发表时间：
2011
影响因子：
3.9
通讯作者：
Chengxiong Huang
中科院分区：
文献类型：
--
作者：
C. Hsiao;C. Shih;C. Chien;Chengxiong Huang
这项工作展示了钛铁矿钛酸镁 (MgTiO3) 薄膜在 c 面蓝宝石上的外延生长。通过调节衬底温度、退火温度和退火时间，得到了(003)择优取向的MgTiO3薄膜；当钛酸镁薄膜在室温下沉积然后进行后退火时，发现了（111）优先的尖晶石 Mg2TiO4。 X 射线衍射用于识别晶体的方向和质量，提供有助于阐明 MgTiO3/蓝宝石和 Mg2TiO4/蓝宝石界面之间的外延关系的信息。测量了 MgTiO3 的光学性质，发现 (003) 优先的 MgTiO3 是光学应用的良好候选者。
This work demonstrates the epitaxy of ilmenite magnesium titanate (MgTiO3) thin films on c-plane sapphire. MgTiO3 thin film with a (003) preferred-orientation was obtained by adjusting the substrate temperature, annealing temperature, and annealing time; (111)-preferring spinel Mg2TiO4 was found when magnesium titanate thin films were deposited at room temperature and then postannealed. X-ray diffraction was used to identify the orientation and quality of the crystal, providing information that is useful in elucidating the epitaxial relationships between the MgTiO3/sapphire and Mg2TiO4/sapphire interfaces. The optical properties of the MgTiO3 were measured, and (003)-preferring MgTiO3 was found to be a good candidate for optical applications.