Anisotropic wet etching on the β-phase poly(vinylidene fluoride) film
Anisotropic wet etching on the β-phase poly(vinylidene fluoride) film
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β相聚偏二氟乙烯薄膜的各向异性湿法刻蚀
DOI：
10.1049/mnl.2019.0304
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发表时间：
2020
影响因子：
1.3
通讯作者：
Hirofumi Miki ; Shigeki Tsuchitani ; Ryota Sugii ; Taisuke Tominaga
中科院分区：
文献类型：
--
作者：
平田正吾;奥住秀之;Hirofumi Miki ; Shigeki Tsuchitani ; Ryota Sugii ; Taisuke Tominaga
在柔性和压电β相聚偏氟乙烯（PVDF）薄膜上直接制造微图案或微结构的能力，在微机电系统领域具有潜在的应用前景。作者通过湿蚀刻技术在110 μm厚的柔性β相PVDF薄膜上直接实现了几十到几百个微图案。实验还发现，在湿法蚀刻工艺中，β相PVDF薄膜表现出各向异性的蚀刻特性。在本文中，作者首次报道了β相PVDF薄膜微图案的制备工艺及其各向异性湿蚀刻性能。
The ability to fabricate micro patterns or micro structures directly on a flexible and piezoelectric β‐phase poly(vinylidene fluoride) (PVDF) film, has potential applications in the field of micro‐electro‐mechanical systems. The authors realised several tens to several hundred of micro patterns directly on a 110‐μm thick flexible β‐phase PVDF film by wet‐etching technology. Through experiments, the authors also found that the β‐phase PVDF film shows anisotropic etching characteristic in the proposed wet‐etching process. In this Letter, the authors reported β‐phase PVDF film micropattern fabrication process and its anisotropic wet‐etching properties for the first time.