Effects of Si doping in high-quality AlN grown by MOVPE on trench-patterned template
Effects of Si doping in high-quality AlN grown by MOVPE on trench-patterned template
复制标题
MOVPE 沟槽模板生长高质量 AlN 中 Si 掺杂的影响
DOI:
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发表时间:
2012
影响因子:
1.8
通讯作者:
H. Miyake and K. Hiramatsu
中科院分区:
文献类型:
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作者:
G. Nishio;S. Yang;H. Miyake and K. Hiramatsu