3D integrated photonics platform with deterministic geometry control
3D integrated photonics platform with deterministic geometry control
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DOI：
10.1364/prj.375584
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发表时间：
2020-02-01
影响因子：
7.6
通讯作者：
Hu, Juejun
中科院分区：
文献类型：
--
作者：
Michon, Jerome;Geiger, Sarah;Hu, Juejun
3D光子学有望通过将传统应用扩展到非平面几何形状并添加平面器件无法实现的新功能来扩展光子学的范围。然而，可用的材料选择和器件几何形状受到当前制造方法的限制。在这项工作中，我们开创了一种方法，允许放置在任意预定义的位置在3D集成光子器件阵列使用的制造工艺，利用一个2D图案的屈曲。我们提出了确定性屈曲过程的理论和实验验证，从而展示了该技术的实施，以实现我们认为是第一个完全封装的3D集成光子学平台。进一步展示了该平台在机械应变传感中的应用。(C)2020中国激光出版社
3D photonics promises to expand the reach of photonics by enabling the extension of traditional applications to nonplanar geometries and adding novel functionalities that cannot be attained with planar devices. Available material options and device geometries are, however, limited by current fabrication methods. In this work, we pioneer a method that allows for placement of integrated photonic device arrays at arbitrary predefined locations in 3D using a fabrication process that capitalizes on the buckling of a 2D pattern. We present theoretical and experimental validation of the deterministic buckling process, thus demonstrating implementation of the technique to realize what we believe to be the first fully packaged 3D integrated photonics platform. Application of the platform for mechanical strain sensing is further demonstrated. (C) 2020 Chinese Laser Press