Theoretical and experimental investigation of chemical mechanical polishing of W-Ni-Fe alloy
Theoretical and experimental investigation of chemical mechanical polishing of W-Ni-Fe alloy
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DOI：
10.1088/2631-7990/abefb8
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发表时间：
2021-04-01
影响因子：
14.7
通讯作者：
Kang, Renke
中科院分区：
文献类型：
--
作者：
Guo, Jiang;Shi, Xiaolin;Kang, Renke
为了提高模具和精密仪器的表面质量，需要对钨合金进行精加工。然而，由于两相微观结构性能差异导致的晶界台阶，很难获得高质量的表面。本文对 W-Ni-Fe 合金的化学机械抛光进行了理论和实验研究。阐述了晶界台阶产生的机理，并提出了晶界台阶形成的模型。该机制揭示了机械和化学作用对表面粗糙度和材料去除的影响。该模型经过实验验证，结果表明，适当平衡机械效应和化学效应可以抑制边界台阶的产生，并导致柠檬酸基浆料具有良好的表面质量和高去除率。
Fine finishing of tungsten alloy is required to improve the surface quality of molds and precision instruments. Nevertheless, it is difficult to obtain high-quality surfaces as a result of grain boundary steps attributed to differences in properties of two-phase microstructures. This paper presents a theoretical and experimental investigation on chemical mechanical polishing of W-Ni-Fe alloy. The mechanism of the boundary step generation is illustrated and a model of grain boundary step formation is proposed. The mechanism reveals the effects of mechanical and chemical actions in both surface roughness and material removal. The model was verified by the experiments and the results show that appropriately balancing the mechanical and chemical effects restrains the generation of boundary steps and leads to a fine surface quality with a high removal rate by citric acid-based slurry.