Two-dimensional particle-in-cell Monte Carlo simulation of a miniature inductively coupled plasma source
Two-dimensional particle-in-cell Monte Carlo simulation of a miniature inductively coupled plasma source
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DOI：
10.1063/1.3506536
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发表时间：
2010-11
影响因子：
3.2
通讯作者：
Y. Takao;Naoki Kusaba;K. Eriguchi;K. Ono
中科院分区：
文献类型：
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作者：
Y. Takao;Naoki Kusaba;K. Eriguchi;K. Ono
采用二维轴对称粒子模拟和蒙特卡罗碰撞计算（PIC-MCC）方法研究了一个直径为5 mm、长度分别为6 mm和5 mm的平面线圈的微型电感耦合氩等离子体源的微等离子体特性。射频电磁场与等离子体的耦合是基于碰撞模型和动力学模型进行的。前者采用冷电子近似，后者包括热电子效应。数值分析已进行的压力范围在370-770 mTorr和在450 MHz的射频功率低于3.5 W，然后PIC-MCC的结果与现有的实验数据和流体模拟结果进行了比较。结果表明，与等离子体反应器的尺寸相比，可以看到相当厚的鞘层结构，并且在整个等离子体区域上电子能量分布是非麦克斯韦分布。因此，电子温度的分布…
Two-dimensional axisymmetric particle-in-cell simulations with Monte Carlo collision calculations (PIC-MCC) have been conducted to investigate argon microplasma characteristics of a miniature inductively coupled plasma source with a 5-mm-diameter planar coil, where the radius and length are 5 mm and 6 mm, respectively. Coupling the rf-electromagnetic fields to the plasma is carried out based on a collisional model and a kinetic model. The former employs the cold-electron approximation and the latter incorporates warm-electron effects. The numerical analysis has been performed for pressures in the range 370–770 mTorr and at 450 MHz rf powers below 3.5 W, and then the PIC-MCC results are compared with available experimental data and fluid simulation results. The results show that a considerably thick sheath structure can be seen compared with the plasma reactor size and the electron energy distribution is non-Maxwellian over the entire plasma region. As a result, the distribution of the electron temperature...