Adaptive optics aberration correction for deep direct laser written waveguides in the heating regime
Adaptive optics aberration correction for deep direct laser written waveguides in the heating regime
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DOI：
10.1007/s00339-019-2635-4
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发表时间：
2019-05-01
影响因子：
2.7
通讯作者：
Salter, P. S.
中科院分区：
文献类型：
--
作者：
Bisch, N.;Guan, J.;Salter, P. S.
我们证明了深度相关的球面像差的飞秒激光写入波导在高脉冲重复率制度（1 MHz）的负面影响。写在硼硅酸盐鹰2000玻璃，我们表明，即使在累积加热制度，在更大的深度遇到的焦点失真，防止形成单模波导。液晶空间光调制器被纳入自适应光学像差校正，使低损耗的单模波导被写入在不同的深度高达1毫米。这一结果允许精确制造的3D光子器件组成的均匀波导位于不同的深度。
We demonstrate the negative effect of depth-dependent spherical aberration on femtosecond laser written waveguides fabricated in the high pulse repetition rate regime (1 MHz). Writing inside borosilicate Eagle 2000 glass, we show that, even in the cumulative heating regime, the focal distortion encountered at greater depths prevents the formation of single-mode waveguides. A liquid crystal spatial light modulator was incorporated for adaptive optics aberration correction, enabling low-loss single-mode waveguides to be written at various depths up to 1 mm. This result allows the accurate fabrication of 3D photonic devices consisting of uniform waveguides located at different depths.