Fabrication of fast, highly sensitive all-printed capacitive humidity sensors with carbon nanotube/polyimide hybrid electrodes
Fabrication of fast, highly sensitive all-printed capacitive humidity sensors with carbon nanotube/polyimide hybrid electrodes
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DOI：
10.7567/jjap.55.02bb10
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发表时间：
2016-02-01
影响因子：
1.5
通讯作者：
Takada, Akinori
中科院分区：
文献类型：
--
作者：
Itoh, Eiji;Takada, Akinori
我们利用溶液技术开发了具有高度气体渗透性的碳纳米管顶电极的电容式湿度传感器。以聚酰亚胺为粘结剂的疏水多孔碳纳米管(CNT)网络适合气体渗透，且电容式湿度传感器的响应速度快于20 nm厚Au顶电极的器件。采用碳纳米管顶电极印制的聚酰胺电容式湿度传感器的电容变化几乎与相对湿度成正比，而与环境温度几乎无关。当碳纳米管/聚酰亚胺纳米复合材料作为上电极时，碳纳米管电极与部分氟化聚酰亚胺有很强的粘附性。响应时间几乎与聚酰亚胺介质层厚度的平方d成正比，灵敏度与d成反比。在d<1微米的器件中，响应时间和灵敏度分别降至<1 S和1pF/%RH。(C)2016日本应用物理学会
We have developed capacitive humidity sensors with highly gas permeable carbon nanotube top electrodes using solution techniques. The hydrophobic, porous carbon nanotube (CNT) network with polyimide as a binder was suitable for gas permeation, and the response of the capacitive humidity sensors was faster than that of the device with a 20-nm-thick Au top electrode. The capacitance change of the polymide capacitive humidity sensor with the printed CNT top electrode was almost proportional to the relative humidity and the capacitance was almost independent of the environmental temperature. The CNT electrodes strongly adhered to the partially fluorinated polyimide when CNT/polyimide nanocomposites were used as top electrodes. The response time was almost proportional to the square of the thickness of the polyimide dielectric layer, d, and the sensitivity was inversely proportional to d. The response time and sensitivity respectively decreased to less than 1 s and 1pF/%RH in the device with d less than 1 mu m. (C) 2016 The Japan Society of Applied Physics