Design, Fabrication and Measurement of Pyramid-Type Antireflective Structures on Columnar Crystal Silicon Lens for Millimeter-Wave Astronomy
Design, Fabrication and Measurement of Pyramid-Type Antireflective Structures on Columnar Crystal Silicon Lens for Millimeter-Wave Astronomy
复制标题
毫米波天文柱状晶硅透镜金字塔型增透结构的设计、制作与测量
DOI：
10.1007/s10909-018-2047-4
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发表时间：
2018
影响因子：
2
通讯作者：
Nakai N.
中科院分区：
文献类型：
--
作者：
Nitta T.;Sekimoto Y.;Hasebe T.;Noda K.;Sekiguchi S.;Nagai M.;Hattori S.;Murayama Y.;Matsuo H.;Dominjon A.;Shan W.;Naruse M.;Kuno N.;Nakai N.
大直径硅透镜的金字塔型减反亚波长结构在宽波段天文观测中具有广阔的应用前景。透镜材料，由三菱材料电子化学公司制造的柱状晶体硅，有限公司、使用Martin-Puplett型傅里叶变换光谱仪在约30 K下测量。在200 GHz和1.6 THz之间测量的折射率和介电损耗角正切分别为3.42和1-。利用电磁场模拟器HFSS模拟了三种不同的周期为，深度为的反射型结构，得到了它们的反射率。使用金属结合的V形刀片和专用的三轴机器在由具有150 mm曲率半径的柱状晶体硅制成的100 mm直径的平凸透镜的两侧上制造该结构。周期和深度的制作误差小于。利用矢量网络分析仪在110-170 GHz范围内测量了透镜平面的反射率，结果在~ dB之间，与模拟结果一致。
Pyramid-type antireflective subwavelength structures for large-diameter () silicon lenses are promising for broadband astronomical observations. The refractive index and dielectric loss tangent of the lens material, columnar crystal silicon which is manufactured by Mitsubishi Materials Electronic Chemicals Co., Ltd., were measured at around 30 K using a Martin–Puplett-type Fourier transform spectrometer. The measured refractive index and dielectric loss tangent between 200 GHz and 1.6 THz were3.42 and 1–, respectively. Three different pyramid-type structures with a period ofand depth ofwere simulated to obtain their reflectance using an electromagnetic field simulator, HFSS. The structures were fabricated on both sides of a 100-mm-diameter plane-convex lens made of columnar crystal silicon with a 150-mm radius of curvature using a metal-bonded V-shaped blade and a dedicated three-axis machine. The fabrication errors in the period and depth were less than. The reflectance of the lens flat surface was measured using a vector network analyzer to be betweenanddB in the range of 110–170 GHz, which was consistent with the result from the simulation.