The "Millipede"-More than thousand tips for future AFM storage
The "Millipede"-More than thousand tips for future AFM storage
复制标题
DOI：
10.1147/rd.443.0323
复制
发表时间：
2000-05
期刊：
影响因子：
--
通讯作者：
P. Vettiger;M. Despont;U. Drechsler;U. Dürig;W. Häberle;M. Lutwyche;H. Rothuizen;R. Stutz;R. Widmer;G. Binnig
中科院分区：
文献类型：
--
作者：
P. Vettiger;M. Despont;U. Drechsler;U. Dürig;W. Häberle;M. Lutwyche;H. Rothuizen;R. Stutz;R. Widmer;G. Binnig
我们报道了一种基于原子力显微镜(AFM)的新的数据存储概念--千足虫，它具有潜在的超高密度、太比特容量、小形状因数和高数据速率。它的超高存储密度的潜力已经被一种新的热机械局部探针技术所证明，该技术可以在非常薄的聚合物薄膜中存储和读出数据。利用这一新技术，利用单个悬臂梁/尖端在薄的(50 Nm)聚甲基丙烯酸甲酯(PMMA)层中制造了30-40 nm大小的类似间距尺寸的比特压痕，从而产生了400-500 GB/in的数据存储密度。2通过采用硅表面微机械加工技术批量制造的大型二维(2D)原子力显微镜阵列的并行操作，实现了高数据速率。微/纳机械设备(悬臂梁/尖端)在单个芯片上的超大规模集成(VLSI)导致了有史以来最大和最密集的32×32(1024)AFM悬臂梁2D阵列，具有集成的读/写存储功能。时分多路复用电子设备控制着千足虫阵列芯片并行运行的读/写存储周期。初始面密度为100-200 GB/英寸。2已经在32×32阵列芯片上实现，具有进一步改进的潜力。除了在聚合物或其他介质中存储数据外，我们还展望了纳米级科学和技术的领域，如光刻、高速/大规模成像、分子和原子操纵以及许多其他领域，在这些领域，Millipede可能会打开新的视角和机会。
We report on a new atomic force microscope (AFM)-based data storage concept called the “Millipede” that has a potentially ultrahigh density, terabit capacity, small form factor, and high data rate. Its potential for ultrahigh storage density has been demonstrated by a new thermomechanical local-probe technique to store and read back data in very thin polymer films. With this new technique, 30–40-nm-sized bit indentations of similar pitch size have been made by a single cantilever/tip in a thin (50-nm) polymethylmethacrylate (PMMA) layer, resulting in a data storage density of 400–500 Gb/in. 2 High data rates are achieved by parallel operation of large two-dimensional (2D) AFM arrays that have been batch-fabricated by silicon surface-micromachining techniques. The very large scale integration (VLSI) of micro/nanomechanical devices (cantilevers/tips) on a single chip leads to the largest and densest 2D array of 32 × 32 (1024) AFM cantilevers with integrated write/read storage functionality ever built. Time-multiplexed electronics control the write/read storage cycles for parallel operation of the Millipede array chip. Initial areal densities of 100–200 Gb/in. 2 have been achieved with the 32 × 32 array chip, which has potential for further improvements. In addition to data storage in polymers or other media, and not excluding magnetics, we envision areas in nanoscale science and technology such as lithography, high-speed/large-scale imaging, molecular and atomic manipulation, and many others in which Millipede may open up new perspectives and opportunities.