Shielded-Loop-Type Onchip Magnetic-Field Probe to Evaluate Radiated Emission From Thin-Film Noise Suppressor
Shielded-Loop-Type Onchip Magnetic-Field Probe to Evaluate Radiated Emission From Thin-Film Noise Suppressor
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用于评估薄膜噪声抑制器辐射发射的屏蔽环路型片上磁场探头
DOI：
10.1109/tmag.2007.892998
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发表时间：
2007
影响因子：
2.1
通讯作者：
S. Kawahito
中科院分区：
文献类型：
--
作者：
M. Yamaguchi;S. Koya;H. Torizuka;S. Aoyama;S. Kawahito
采用绝缘体上硅(SOI)工艺，在高阻硅衬底上设计了0.15um的硅集成射频磁场探头。线圈窗的大小为180×180×2。线圈和电极之间用530微米长的带状线隔开，以避免电极部分的杂散电压感应。将该探头应用于薄膜电磁噪声抑制器的辐射辐射测量。结果表明，在1 GHz频率下，信号线中心处的场强被抑制了4.0dB
A silicon integrated RF magnetic field probe has been designed and microfabricated using CMOS-silicon-on-insulator (SOI) technology with a 0.15-mum design rule on a high-resistivity silicon substrate. The size of the coil window was 180times180 mum2. Coil and electrodes were separated by a 530-mum-long stripline so as to avoid stray voltage induction at the electrode portion. This probe was applied to evaluate the radiated emission from a thin-film electromagnetic noise suppressor. It was clarified and shown that the field intensity was suppressed by 4.0 dB at the center of the signal line at 1 GHz
集成电磁噪声抑制器的最佳薄层电阻分析
DOI：
--
发表时间：
2006
期刊：
IEEE Trans. Magn 42(10)
影响因子：
--
作者：
K.Maruta;M.Sugawara;Y.Shimada;M.Yamaguchi
通讯作者：
M.Yamaguchi