Nitrogen doping on ZnO films grown by plasma-assisted MBE and its effects to the transport properties of TFTs
Nitrogen doping on ZnO films grown by plasma-assisted MBE and its effects to the transport properties of TFTs
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等离子体辅助MBE生长的ZnO薄膜的氮掺杂及其对TFT传输特性的影响
DOI:
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发表时间:
2011
期刊:
影响因子:
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通讯作者:
T. Matsumoto
中科院分区:
文献类型:
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作者:
T. Muranaka;Y. Ushiyama;N. Marumo;T. Horii;S. Sano;K. Mizuguchi;Y. Sakurai;Y. Nabetani;T. Matsumoto