Rugate filters fabricated by a radio frequency magnetron sputtering system by use of an optical in situ monitoring technique.
Rugate filters fabricated by a radio frequency magnetron sputtering system by use of an optical in situ monitoring technique.
复制标题
DOI：
10.1364/ao.45.000184
复制
发表时间：
2006
期刊：
影响因子：
1.9
通讯作者：
H. Yoda;D. Tanaka;O. Hanaizumi;Y. Kogami;K. Shiraishi
中科院分区：
文献类型：
--
作者：
H. Yoda;D. Tanaka;O. Hanaizumi;Y. Kogami;K. Shiraishi
我们首次提出了一种新的折射率为正弦分布的栅格滤波器的反馈制造技术。该技术使用了一种原位光学监测系统，与传统的基于时间控制的栅格滤波器技术不同，栅格滤波器通常不适合精确制造连续的折射率分布。由于a-SiOx:H薄膜的折射率可以连续控制，所以我们选用了a-SiOx:H薄膜作为栅格滤波器的材料。利用所提出的技术和材料，制备了具有多重连续折射率分布的近红外栅格负滤光片。实验光谱与计算光谱具有良好的相关性，这是应用反馈制备技术的结果。
We propose, for the first time to our knowledge, a new feedback fabrication technique for rugate filters with sinusoidal refractive index distribution. The technique uses an in situ optical monitoring system, in contrast to conventional techniques for rugate filters that are based on time control, which is generally unsuitable for accurate fabrication of a continuous index distribution. We employed a-SiOx:H thin film as the material for the rugate filters because its refractive index can be successively controlled. Using the proposed technique and material, we fabricated near-infrared rugate minus filters having multiple and continuous refractive index distributions. The experimental and calculated spectra were well correlated as a result of applying the proposed feedback fabrication technique.