Low-threshold whispering-gallery-mode microlasers fabricated in a Nd:glass substrate by three-dimensional femtosecond laser micromachining
Low-threshold whispering-gallery-mode microlasers fabricated in a Nd:glass substrate by three-dimensional femtosecond laser micromachining
复制标题
通过三维飞秒激光微加工在 Nd: 玻璃基底上制造低阈值回音壁模式微型激光器
DOI：
10.1364/ol.38.001458
复制
发表时间：
2013-05-01
期刊：
影响因子：
3.6
通讯作者：
Cheng, Ya
中科院分区：
文献类型：
--
作者：
Lin, Jintian;Xu, Yingxin;Cheng, Ya
本文报道了利用飞秒激光三维微加工技术在钕玻璃基片上制备回音壁模式微激光器的研究。主要的制造过程包括制造的独立的微盘支持薄支柱的飞秒激光烧蚀的玻璃基板浸在水中，然后通过CO2激光退火的表面平滑。所制作的微腔的品质因数（Q）被测量为1.065 × 10（6）。激光被观察到在泵浦阈值低至类似于69 μ W，在室温下与连续波激光二极管工作在780 nm。该技术允许在各种电介质材料（例如玻璃和晶体）中制造高Q因子的微腔。(C)2013年美国光学学会
We report on fabrication of whispering-gallery-mode microlasers in a Nd:glass chip by femtosecond laser three-dimensional micromachining. The main fabrication procedures include the fabrication of freestanding microdisks supported by thin pillars by femtosecond laser ablation of the glass substrate immersed in water, followed by CO2 laser annealing for surface smoothing. The quality (Q) factor of the fabricated microcavity is measured to be 1.065 x 10(6). Lasing is observed at a pump threshold as low as similar to 69 mu W at room temperature with a continuous-wave laser diode operating at 780 nm. This technique allows for fabrication of microcavities of high Q factors in various dielectric materials, such as glasses and crystals. (C) 2013 Optical Society of America