Insect Type MEMS Micro Robot Controlled by CMOS IC of Hardware Neural Networks
Insect Type MEMS Micro Robot Controlled by CMOS IC of Hardware Neural Networks
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DOI：
10.7551/978-0-262-31709-2-ch079
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发表时间：
2013-09
期刊：
影响因子：
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通讯作者：
M. Takato;S. Yamasaki;S. Takahama;J. Tanida;Ken Saito;F. Uchikoba
中科院分区：
文献类型：
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作者：
M. Takato;S. Yamasaki;S. Takahama;J. Tanida;Ken Saito;F. Uchikoba
本文介绍了一种由硬件神经网络的CMOS集成电路控制的昆虫型微型机器人。微机器人采用微机电系统（MEMS）技术在硅片上加工而成，驱动器由基于形状记忆合金的人工肌肉丝组成。类昆虫行走是通过连杆机构实现的，该连杆机构将致动器的旋转运动转换为机车运动。CMOS集成电路产生微机器人的驱动波形，实现仿昆虫行走。硬件神经网络被构建为细胞体模型和抑制性突触模型。硬件神经网络的输出信号端口连接到人工肌线驱动电路。该机器人系统不需要专门的软件程序和A/D转换器。开发的神经网络由自我功能的、相互连接的多个单位神经元组成。为了正确的驾驶，开发的神经网络控制中的每个神经元必须同步，就像生物体的神经网络中发生的那样。在本研究中，MEMS微机器人的运动控制的非同步和反相同步驱动波形。当输入非同步驱动波形时，微型机器人停止行走运动，但在接收到反相同步驱动波形时恢复行走。所制作的微型机器人的侧向、末端和高度尺寸分别为4.0 mm、2.7 mm和2.5 mm。获得的运动速度为26.4 mm/min，步长为0.88 mm。
This paper describes insect type micro robots controlled by a CMOS IC of hardware neural networks. The micro robot is fabricated by the micro electro mechanical systems (MEMS) technology using a silicon wafer, and the actuator is composed of artificial muscle wires on the basis of shape memory alloy. Insect-like walking is achieved by link mechanisms that transform the actuator’s rotational motion to locomotive motion. The CMOS IC generates the driving waveform of the micro robot and realizes insect-like walking. The hardware neural networks are built as cell body models and inhibitory synaptic models. The output signal ports of the hardware neural networks are connected to the artificial-muscle-wire-driving circuit. This robot system does not require specialized software programs and A/D converters. The developed neural networks are composed of self-functioning, interconnected plural unit neurons. For proper driving, each neuron in the developed neural network control must be synchronized, as occurs in the neural networks of living organisms. In this study, the motion of the MEMS micro robot is controlled by non-synchronization and anti-phase synchronization driving waveforms. When the nonsynchronization driving waveform is input, the micro robot ceases walking motion, but resumes walking upon receipt of the anti-phase synchronization driving waveform. The sideways, endways, and height dimensions of the fabricated micro robot are 4.0 mm, 2.7 mm and 2.5 mm, respectively. The obtained locomotion speed is 26.4 mm/min and the step width is 0.88 mm.