Combinatorial Pulsed Laser Deposition of Pentacene Films for Field Effect Devices
Combinatorial Pulsed Laser Deposition of Pentacene Films for Field Effect Devices
复制标题
用于场效应器件的并五苯薄膜的组合脉冲激光沉积
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
H. Koinuma
中科院分区：
文献类型：
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作者：
Junpei Yamaguchi;K. Itaka;T. Hayakawa;Keiichiro Arai;Mitsugu Yamashiro;Seiichiro Yaginuma;H. Koinuma
采用组合脉冲激光沉积（PLD）技术制备了场效应器件用并五苯薄膜。采用脉冲激光沉积技术，以Nd：YAG激光波长、能量密度和衬底温度为组合参数制备并五苯薄膜。从薄膜的红外和紫外-可见吸收光谱以及电学性质分析，阐明了激光波长和能量密度是影响薄膜性能的主要因素。
Combinatorial pulsed laser deposition (PLD) technique has been applied to the fabrication of pentacene thin films for field effect devices. The pentacene films were fabricated by PLD with the Nd:YAG laser wavelength, fluence and the substrate temperature as combinatorial parameters. From the IR and UV-vis absorption spectra and electrical properties of the films, the laser wavelength and fluence have been eluctidated to be factors dominating the properties of the film.